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VL-10-A Vacuum Plasma Treatment System

Ais Mühendislik, KeyLink Technologyis the Official Distributor of in Turkey.
Input Voltage AC220V(±10%)
Proses Gazları 0,3~0,4Mpa
Size L550×W550×H830mm (subject to the actual product)
Weight About 200Kg
Appearance Paint dark blue
Total Power 1,8 kW
Power supply 300W
Power 13.56MHz/40KHz
Time from vacuuming to cleaning preparation Within 20s
Vacuum line All stainless steel pipes and high-strength vacuum bellows
Chamber Material Stainless steel
Chamber Thickness 10 mm
Sealing Ultimate vacuum degree 15Pa/s
Chamber Internal Dimensions (Customizable) 280×180×270mm (width×height×depth)
Effective Size of Electrode Plate (Customizable) 220×210mm (width×depth)
Available Space Spacing (Customizable) 32mm
Electrode Plate Arrangement (Customizable) Horizontal electrode plates, plate spacing 48mm
Work Tray (Customizable) 3-layer wire mesh pallet
Workspace (Customizable) 3 layers
Process Gas Flow Range 0~300SCCM
Process Gas Circuit (Customizable) Standard configuration: Argon and oxygen two-way process gas (1 MFC)
Gas Pipeline Teflon material
Control System PLC (Siemens)
HMI Touch interaction:7-inch touch screen (Siemens)
Control Mode Automatic and manual mode control (switchable)
 

VL-80-A Vacuum Plasma Treatment System

Ais Mühendislik, KeyLink Technologyis the Official Distributor of in Turkey.
Input Voltage AC380V,50/60Hz
Proses Gazları 0,3~0,4Mpa
Size L930×W765×H1750mm (subject to the actual product)
Weight About 500Kg
Appearance White
Total Power 4,5 kW
Power supply 1000W
Power 13.56MHz/40KHz
Time from vacuuming to cleaning preparation ≤60s
Vacuum line All stainless steel pipes and high-strength vacuum bellows
Chamber Material Stainless steel
Chamber Thickness 20mm
Sealing Militaries welding seal, ultimate vacuum degree 15Pa/s
Chamber Internal Dimensions (Customizable) 515×400×410mm(width×height×depth)
Effective Size of Electrode Plate (Customizable) 430×290mm(width×depth)
Available Space Spacing (Customizable) 32mm
Electrode Plate Arrangement (Customizable) Horizontal electrode plates, plate spacing 48mm
Work Tray (Customizable) 6-layer wire mesh pallet
Workspace (Customizable) 6 layers
Process Gas Flow Range 0~300SCCM
Process Gas Circuit (Customizable) Standard configuration: Argon and oxygen two-way process gas(2 MFC)
Gas Pipeline Teflon material
Control System PLC (Siemens)
HMI Touch interaction:7-inch touch screen (Siemens)
Control Mode Automatic and manual mode control (switchable)